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Superpolished Substrates and Mirrors

  • Variety substrate materials: BK7, UV fused silica, Zerodur, ZnSe, ZnS, Ge, Si, CaF2, MgF2 and Sapphire.
  • Unique polishing processing
  • Surface Roughness down to 1Å
  • High Reflection (HR) coating and Anti-reflection (AR) available
  • Applications: DUV lasers, high power lasers, gyroscope
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Material Specifications ZnSe, ZnS Ge, Si, CaF2, MgF2  Fused Silica, BK7. Zerodur  Sapphire
Diameter up to Φ300mm up to Φ300mm up to Φ350mm up to Φ300mm
PV PV≤0.1λ @ 632.8nm PV≤0.1λ @ 632.8nm PV≤0.1λ @ 632.8nm PV≤0.15λ @ 632.8nm
rms rms≤0.02λ @ 632.8nm rms≤0.02λ @ 632.8nm rms≤0.02λ @ 632.8nm rms≤0.03λ @ 632.8nm
Roughness ≤0.2nm ≤0.2nm ≤0.1nm ≤0.2nm


Roughness of Super-polished Surface Measured by Atom Force Microscope (AFM)
(Fused Silica Substrate with Diameter 200mm, Ra=0.28nm)

Flatness of Super Polished Surface Measure by Zygo Interference Instrument
(Fused Silic Substrate of Diameter 300mm, PV=0.101 Wave @633nm)

Superpolished substrates or mirrors are necessary for some demanding applications like Deep Ultra-violet (DUV) lasers, ultra-high power laser systems and ring laser gyroscopes, low surface scattering loss is required for these applications, the low surface roughness optical components or superpolished optics is necessary to get such low scattering loss. Hangzhou Shalom EO offers the super-polished mirrors or substrates, with extra high flatness, roughness and surface quality, substrate materials include:  BK7, UV fused silica, Zerodur, ZnSe, ZnS, Ge, Si, CaF2, MgF2 and sapphire.