| Specification | |
| Top Functional Layer | |
Diameter |
3, 4, 6 inches |
Orientation |
X, Y-42, Y-46.3, Z, etc. |
Material |
LiTaO3, LiTaO3, Quartz, etc. |
Thickness |
5-50μm |
| Substrate | |
Material |
Si |
Thickness |
230-500μm |
Modules or Types:
| Single-crystal Lithium Tantalate Thin Film |
| Silicon Substrates |
| Single-crystal Lithium Niobate Thin Film |
| Silicon Substrates |
| Single-crystal Quartz Thin Film |
| Silicon Substrates |
