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5-50 μm LT, LN, Quartz on Si


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Specification
Top Functional Layer

Diameter

3, 4, 6 inches

Orientation

X, Y-42, Y-46.3, Z, etc.

Material

LiTaO3, LiTaO3, Quartz, etc.

Thickness

5-50μm

Substrate

Material

Si

Thickness

230-500μm

 

Modules or Types:

Single-crystal Lithium Tantalate Thin Film
Silicon Substrates

 

Single-crystal Lithium Niobate Thin Film
Silicon Substrates

 

Single-crystal Quartz Thin Film
Silicon Substrates