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Home > Wafers and Substrates > Substrates and Wafers for Semiconductor Film Growth > 5-50 μm LTOI, LNOI, Quartz on Si

5-50 μm LNOI, LTOI, Quartz on Silicon

  • Dimensions: diameters: 3,4 inches, thicknesses: 5-50μm
  • Orientations:X, Y-42, Y-46.3, Z, etc. 
  • Top functional layers made of LiTaO3, LiNbO3, Quartz available
  • Silicon substrates with thicknesses of 230-500μm available
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Specification
Top Functional Layer

Diameter

3, 4, 6 inches

Orientation

X, Y-42, Y-46.3, Z, etc.

Material

LiTaO3, LiTaO3, Quartz, etc.

Thickness

5-50μm

Substrates

Material

Si

Thickness

230-500μm

 

Modules or Types:

Single-crystal Lithium Tantalate Thin Film
Silicon Substrates

 

Single-crystal Lithium Niobate Thin Film
Silicon Substrates

 

Single-crystal Quartz Thin Film
Silicon Substrates

This catalog specifies Shalom EO's Lithium Niobate On Insulator (LNOI), Lithium Tantalate On Insulator (LTOI), and Quartz on Insulator consisting of LiNbO3, LiNbO3, or quartz thin films constructed on silicon substrates. The thickness range of the top functional thin film is 5μm-50μm, and the thickness range of the Si substrates is 230-500μm.