SrTiO3 Substrates

Twinless crystal structure, excellent physical and good mechanical properties
Maximum diameter: 35mm, typical thickness 0.5 /1.0mm
Stocked and custom SrTiO3 substrate
Surface Roughness: Ra < 0.5nm
Clean package: class1000 clean room and class 100 bags
Other applications: epitaxial growth of HTSC and oxide thin films (e.g., YBCO, Bi-system, La-system, etc.), Special optical windows, high-quality sputtering, Magnet Sputtering, Pulsed Laser Deposition (PLD)

Code	Size	Thickness	Orientation	Surface Finish	Unit Price	Delivery
642-001	5x5mm	0.5mm	<100>	SSP	Inquire	2 weeks
642-002	5x5mm	0.5mm	<100>	DSP	Inquire	2 weeks
642-003	5x5mm	0.5mm	<110>	SSP	Inquire	2 weeks
642-004	5x5mm	0.5mm	<111>	SSP	Inquire	2 weeks
642-005	10x10mm	0.5mm	<100>	SSP	Inquire	2 weeks
642-006	10x10mm	0.5mm	<100>	DSP	Inquire	2 weeks
642-007	10x10mm	0.5mm	<110>	SSP	Inquire	2 weeks
642-008	10x10mm	0.5mm	<111>	SSP	Inquire	2 weeks
642-009	Φ12.7mm	0.5mm	<100>	SSP	Inquire	2 weeks
642-010	Φ12.7mm	0.5mm	<100>	DSP	Inquire	2 weeks
642-011	Φ20mm	0.5mm	<100>	SSP	Inquire	2 weeks
642-012	Φ20mm	0.5mm	<100>	DSP	Inquire	2 weeks
642-013	Φ25.4mm	0.5mm	<100>	SSP	Inquire	2 weeks
642-014	φ25.4mm	0.5mm	<100>	DSP	Inquire	2 weeks

Strontium Titanate or SrTiO3 (STO) single crystal has a twinless crystal structure and very good physical and mechanical properties for film growth. STO provides a good lattice match to most materials with Perovskite structure. It is an excellent substrate for epitaxial growth of HTSC (High-Temperature Superconductor) and various oxide thin films. Its lattice constant (3.905Å) matches well with the common high TC superconductive material YBCO (lattice constant 3.88 Å). STO is also a suitable platform for other high TC films such as Bi-system, La-system, and others. SrTiO3 single crystal has been utilized for special optical windows and as a high-quality sputtering target as well. It can also accommodate diverse film growth technologies such as Magnet Sputtering, Pulsed Laser Deposition (PLD), Vaporization, MOCVD, CVD, laser MBE, etc. Films made with these materials and technologies on SrTiO3 wafers exhibit excellent performance.

Hangzhou Shalom EO provides stocked standard SrTiO3 (or STO) wafers and customized wafers.

Common Specifications:

Materials	SrTiO3 crystals	Orientations	＜100＞,＜110＞,＜111＞
Orientation Error	±0.5°	Maximum Diameter	35mm
Typical Thickness	0.5mm, 1.0mm	Thickness Tolerance	±0.05mm
Size Tolerance	±0.1mm	Surface Finish	SSP or DSP
Roughness	Ra<0.5nm	Cleanness and Package	class 1000 clean room, class 100 bags

STO Basic Properties:

Crystal Structure	M6	Growth Method	Blaze method
Unit Cell Constant	a=3.905Å	Twin Structure	Twin free
Color	Colorless to light yellow	Melt Point（℃）	2080
Density（g/cm³）	5.175（g/cm³）	Hardness	6-6.5（mohs）
Thermal Expansion（/℃）	9.4×10^-6	Thermal Conductivity	120 milliwatts/cm °C at 100 °C
Dielectric Constants	ε=300	Chemical Stability	Insoluble in water
Tangent Loss	~5×10^-4（300k） ~3×10^-4（77k）	Specific Resistivity	> 10⁷Ohm/cm
Transmission Range	0.4 to 6 µm	Refraction Index	nc = 2.380 nd = 2.409 nf = 2.488
Dispersion	(nf - nc) = 0.108

Curves:

1）Typical X-Ray Diffraction (XRD) Curve of SrTiO3 Crystals Substrates

2) Typical Surface Roughness of SrTiO3 substrate <100> measured by Atomic Force Microscope (AFM) in 5μm x 5μm Scale

SrTiO3 Substrates

SrTiO3 Wafers Φ25.4mmx0.5mm <100> DSP

SrTiO3 Wafers Φ20mmx0.5mm <100> SSP

SrTiO3 Wafers Φ25.4mmx0.5mm <100> SSP