|Materials||SAW grade LiTaO3 crystals||Orientation||X+112°-Y|
|BOW||25μm||Primary Reference Flat||22+/-2mm|
|Secondary Reference Flat||Optional||Polished Surface Roughness||<1nm|
|Back Side Criteria||0.2-0.5μm or customized||Edge Rounding||Compliant with SEMI M1.2 Standard/refer to IEC62276|
Hangzhou Shalom EO offers the SAW grade lithium Tantalate (or LiTaO3) crystals s and wafers, advanced facilities are equipped for crystals growing, wafer cutting, wafer lapping, wafer polishing and wafer checking, all finished products are passed at Testing of curie Temp and QC inspections.
The SAW grade LiTaO3 crystals boules, blanks, wafer blanks and polished wafers are available upon customer’s request.