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  • Glass Wafers and Substrates
  • Glass Wafers and Substrates

Glass Wafers and Substrates

  • Brands: SCHOTT Borofloat33/B270/D263/N-BK7/Zerodur, Corning Pyrex and Eagle XG, CDGM (China) H-K9L/H-ZF/MJB5
  • Specifications compliant to SEMI Standards and QC inspected
  • Fused Silica Wafers and Substrates also available
  • Custom dimensions and shapes upon request
  • Typical applications: Semiconductor applications, Substrates for Coating of Optical Components (Optical Mirrors, Filters, etc), Microfluidic Chips, LCD, and others
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Specifications:

Note: The Specifications of Standard Glass Wafers and Substrates are listed below, other custom modules with Diameters up to 450mm, and Minimum Thickness of 30μm are available.

Item (Standard) 4 inch 6 inch 8 inch 12 inch
Brands and Materials SCHOTT Borofloat33/B270/BK7/D263, Corning Eagle XG/Pyrex, CDGM H-K9L/H-ZF/MJB5, Soda Lime Glass
Diameter (of Round or Square Shape) 100mm 150mm 200mm 300mm
Dimension Tolerance ±0.3mm ±0.3mm ±0.3mm ±0.5mm
Thickness ≥0.15mm ≥0.25mm ≥0.3mm ≥0.3mm
Primary Flat 32±2mm 57.5/42±2mm Notch Notch
LTV (5mmx5mm) <1μm <1μm <1μm <2μm
TTV <1.5μm <3μm <5μm <5μm
Bow ±20μm ±30μm ±40μm ±50μm
Warp ≤25μm ≤30μm ≤50μm ≤60μm
PLTV (0.5μm within 5mmx5mm) ≥95% ≥95% ≥95% ≤95%
Edge Bevel According to IEC62276&SEMI M1.2 Standard
Polished Side Roughness(Ra) ≤1nm
Surface Quality, S/D 40/20

Glass Wafers and Substrates are thin discs or squares of glass materials. The term glass means a vitreous solid formed by rapid cooling after being heated towards its liquid state. 

Shalom EO offers Glass Wafers and Substrates made from glass equivalent to SCHOTT Borofloat33/B270/D263/N-BK7/Zerodur, Corning Pyrex and Eagle XGCDGM H-K9L/H-ZF/MJB5, and conventional Soda Lime Glass, etc. Glass substrates coated with ITO (Indium Tin Oxide) conducting film for LCD(Liquid Crystal Display) are also available. The advantages of these glass materials include superior thermal and chemical stability, excellent dielectric properties, high spectral optical transmission, etc, which differ according to the glass type.

The wafers and substrates could be provided either in polished (single side or double side optional) for high-end applications or unpolished versions at economized prices, where Shalom EO utilizes an abrasion-free lapping and CNC machining process, to achieve exceptionally low Total Thickness Verification (TTV), tight geometric deviations and the desired flatness. Cautious inspections are carried out in cleanrooms before deliveries to ensure qualities compliant to the SEMI standards. 

The lowest thickness is down to 3um, and a wide spectrum of Thermal Expansion Coefficients is accessible, with other specifications(shapes, dimensions, material selection, etc.) free for customization. Our experienced engineer team is also willing to offer constancy at your request.


Typical Applications:

  • Semiconductor applications: carrier substrates for thin silicon wafer processing (3D IC,K RF IC, and Fan-out packaging)
  • Liquid Crytal Display panel (we could offer modules readily coated with ITO Conductive Films)
  • 3D Imaging and Sensing
  • Various kinds of bonding processes are enabled, including Laser Bonding, Anodic Bonding, and more.
  • Substrates for Coating of Optical Components (Optical Mirrors, Filters, etc)
  • Wafer-level packaging and protection panels
  • MEMS (Micro-electromechanical systems), where glass wafers could be used as hermetic housing and carrier substrates, etc.
  • Laboratory and Biotechnology research
  • Microfluidic Chips (Nanoimprint Lithography)
  • Optical Windows
  • Optical Imaging Lenses
  • Medical Devices
  • Spacecrafts and Astronomical telescopes


Features of materials:

BOROFLOAT33:

SCHOTT BOROFLOAT33 is a float Borosilicate Glass developed and designated by SCHOTT GmbH. With a chemical composition of 81% Silicate, 12% Boric Oxide and other minor additives, the high-quality glass material features:

  • Excellent optical transmittance in UV to IR spectrum and low fluorescence.
  • Low thermal expansion coefficient (1/3 of the Soda Lime Glass) and high thermal shock resistance (Long term use temperature up to 450℃)
  • Eminent chemical stability, endurable to attacks of water, strong alkalines, and acids.
  • Superior insulation qualities attributed to its low alkali content.

Datasheet of SCHOTT BOROFLOAT33

B270/N-BK7/H-K9L:

Pertaining to the crown glass family, B270/N-BK7/H-K9L exhibits very similar characteristics, the most distinctive one being their outstanding optical qualities of homogeneous refractive index and remarkable transmission. When the extra benefit(extremely high UV transmission) of UV Fused Silica is not required, SCHOTT B270/N-BK7 and CDGM H-K9L are attractive candidates for making optical components. 

SCHOTT B270 (Superwhite Crown Glass) performs great transmission from UV-A to the NIR wavelength range with no characteristic absorption in the Visible range. Additionally, it is highly solarisation-resistant, the most common application of it is high end optical filters, touch panels, etc. 

SCHOTT N-BK7 and its Chinese substitute H-K9L are optical borosilicate crown glass especially apt for producing high precision optics, majorly in the Visible spectrum. Besides, N-BK7 and H-K9L are virtually free of bubbles and inclusions, the high homogeneity of refractive index making them excellent for high energy laser systems, metrology systems, etc.

Datasheet of B270/N-BK7/H-K9L

SCHOTT ZERODUR:

SCHOTT ZERODUR is a non-porous, inorganic glass-ceramic. With the perfect balance of the vitreous state and the crystalline state, the Zerodur glass features near-zero thermal expansion, being capable to withstand temperature fluctuations without warping. Because the chemical and mechanical properties of glass-ceramics are very close to that of normal glass, the processing method of normal glass is also feasible for glass-ceramics. This glass type is particularly recommendable for astronomical applications such as telescopes and ring laser gyroscopes.

Datasheet of SCHOTT ZERODUR

Corning Eagle XG:

Corning Eagle XG is an Alkaline Earth Boro-Aluminosilicate glass. Its features of lightweight, 92% transmission in the visible spectrum, and low surface flatness tolerance make it the ideal choice for liquid crystal display (LCD) panels and extensive applications in the electro-optical industry. The exclusion of potassium and sodium ions implies Corning Eagle XG is more friendly to the environment.

Datasheet of Corning Eagle XG

CDGM H-ZF and MJB5:

H-ZF is a kind of modified Dense Flint Glass, with Antimony oxide replacing the original Arsenic composition, Titanium oxide, and Niobium oxide replacing the lead composition. Compared to traditional ZF glass The H-ZF is much more environmentally friendly without the radioactive element while retaining the traits of high refractive index and low Abbe number. The H-ZF glass is particularly suitable for optical imaging lenses.

MJB5 is a crystalline glass with high strength, which could be easily strengthened by a chemically compressive strength layer. The MJB5 glass could be extensively applied for products with a small thickness (e.g. protection panels of mobile phones, watches, etc.). Its mechanical properties could even be better than the sapphire after chemically optimized.

Soda Lime Glass

Soda Lime glass is the most prevalent and cheap glass, recommended for moderate and ordinary applications. Because the high melting point of quartz requires high temperature to acquire the glass transition, to reduce the difficulty of fabrication, soda (Na2CO3) is added to the Silicon Oxide to lower the melting temperature, with other additives such as lime (CaO) serve to increase the durability of glass.